High-resistance GaN epilayers with low dislocation density via growth mode modification
Xu Z.Y. Xu Fu-Jun Wang Jia-Ming Lu L. Yang Zhijian Wang Xinqiang Shen B. · 2016
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期刊名称:
Journal of Crystal Growth   2016 年 450 卷
发表日期:
2016.09.15
摘要:
High-resistance GaN with low dislocation density adopting growth mode modification has been investigated by metalorganic chemical vapor deposition. The sheet resistance of the order of 10
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