Investigation of ultra-short-period W/C multilayers for soft X-ray optics

王风丽王占山秦树基吴文娟张众王洪昌陈玲燕 · 2005

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期刊名称：

Chinese Optics Letters 2005 年 07 期

摘要：

Ultra-short-period W/C multilayers having periodic thickness range of 1.15—3.01 nm have been fabricated for soft X-ray optics using the high vacuum direct current (DC) magnetron sputtering system. These mul- tilayers were characterized by low-angle X-r...