Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacitively Coupled Argon Discharges: One-Dimensional Fluid Simulation
capacitively coupled plasmas
期刊名称：
Plasma Science and Technology
2008 年
01 期
摘要：
A one-dimensional fluid model is proposed to simulate the dual-frequency capac-itively coupled plasma for Ar discharges.The influences of the low frequency on the plasmadensity,electron temperature,sheath voltage drop,and ion energy distribution at th...
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