Driving frequency effects on the mode transition in capacitively coupled argon discharges
capacitively coupled plasma
期刊名称：
Chinese Physics B
2011 年
06 期
摘要：
A one-dimensional fluid model is employed to investigate the discharge sustaining mechanisms in the capacitively coupled argon plasmas, by modulating the driving frequency in the range of 40 kHz-60 MHz. The model incorporates the density and flux balan...
会员登录
