One-Dimensional Fluid Model of Pulse Modulated Radio-Frequency SiH_4 /N_2 /O

One-Dimensional Fluid Model of Pulse Modulated Radio-Frequency SiH_4 /N_2 /O_2 Discharge

王燕刘相梅宋远红王友年 · 2012

阅读量：45

pulsed modulation

SiH4

O2 discharge

capacitively coupled plasma

fluid model

期刊名称：

Plasma Science and Technology 2012 年 02 期

摘要：

Driven by pulse modulated radio-frequency source,the behavior of SiH 4 /N 2 /O 2 plasma in capacitively coupled discharge are studied by using a one-dimensional fluid model.Totally,48 different species(electrons,ions,neutrals,radicals and excited speci...