Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge
摘要：
A one-dimensional fluid/Monte-Carlo(MC)hybrid model is developed to describe capacitively coupled SiH_4/Ar discharge,in which the lower electrode is applied by a RF source and pulse modulated by a square-wave,to investigate the modulation effects of th...
会员登录
